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Micro Nano Facilities
Fondazione Bruno Kessler
Trento , Italy
Clean Room MEMS 200 m2 Class 100/1000 Diffusion, lithography (mask aligner), waferbonding, electroplating, Si bulk micromachining, metal evaporation, RIE, mechanical and opticalprofilometry
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Details
- Title: Micro Nano Facilities
- Rights: FBK photo archive. Picture by Carlo Baroni
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